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, Modelo del voltaje de descarga en depósitos de ZrOX por erosión iónica reactiva
García-Gradilla, V. - Soto-Herrera, G. - Machorro-Mejía, R. - Mitrani-Abenchuchan, E.
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A Berg model application for ZrOX thin film deposition by DC reactive sputtering is presented. An alternative treatment to this model is proposed, focused on an engineering point of view. Berg model involves target poisoning as a compound covering a…
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| Fecha: |
2010-01-29 |
| Recurso: |
Revistas UNAM |
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