| Título: | Microfabrication : using bulk wet etching with TMAH |
| Autores: | Duan, Xuefeng, 1981- |
| Fecha: | 2005 |
| Publicador: | McGill University - MCGILL |
| Fuente: |
 |
| Tipo: | Electronic Thesis or Dissertation |
| Tema: | Physics, Condensed Matter. |
| Descripción: |
In November 2002 a Microfabrication Lab was established in the physics department of McGill University to support research in nanoscience and technology. At the same time, I arrived at McGill to begin my graduate study. So I was assigned to do research on microfabrication, especially bulk wet etching of silicon using TetraMethyl Ammonium Hydroxide (TMAH). The content of microfabrication is quite broad, and also very useful in both industry and academic. Since our fab is a newly built one and I had no experience in this area before, this thesis mainly included some basic processes in microfabrication, such as the photolithography, wet etching, reactive ion etching, and soon. Also it compared the wet etching with dry etching. Some results of TMAH wet etching were showed in the thesis, which agreed well with that of the other groups. A simulation program was developed to predict the etching result of TMAH and it appeared to work well. Finally, based on the knowledge and experience acquired, processes in making cantilever and tip structures, which are critical in the scanning probe microscopes, were developed. Silicon oxide cantilevers with length of 100-200 mum, width of 30-50 mum, and thickness of 1 mum were obtained. Pyramid like silicon tips were also fabricated using the wet etching. |
| Idioma: | en |
1 Investigations on the form-genera Beauveria and Tritirachium por MacLeod, Donald Murdock | 6 Treatment and recovery in first-episode psychosis : a qualitative analysis of client experiences por Windell, Deborah L. |
2 Seismic sensitivity of tall guyed telecommunication towers. por Ghodrati Amiri, Gholamreza. | 7 |
3 Exploring the Relationship Between Assets and Family Stress Among Low-Income Families por Rothwell, David W.,Han, Chang-Keun | 8 |
4 The case for asset-based interventions with indigenous peoples: Evidence from Hawai‘i por Rothwell, David W. | 9 |
5 Second Thoughts: Who Almost Participates in an IDA Program? por Rothwell, David W.,Han, Chang-Keun | 10 Recent contributions to the phenomenology of musical time : a critical survey por Beaudreau, Pierre |