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Título: Zinc oxide thin film fabrication, characterization and application to acoustic fibers
Autores: Tang, Zhirong
Fecha: 1990
Publicador: McGill University - MCGILL
Fuente:
Tipo: Electronic Thesis or Dissertation
Tema: Engineering, Electronics and Electrical.
Physics, Condensed Matter.
Descripción: High quality, well oriented Zinc Oxide polycrystal thin films on oriented Si crystal surfaces and amorphous SiO$ sb2$/Si, Corning Glass and Al/SiO$ sb2$/Si substrates have been produced by a DC conical reactive S-GUN magnetron sputtering technique. X-Ray diffraction measurements, scanning electron microscopy measurements and ultrasonic measurements have been used to characterize the film properties. It has been shown that our films have 1$ sp circ$ Full Width Half Magnitude rocking curves of (002) and (004) reflection planes on Si surfaces, 1.2$ sp circ$ FWHM (002) and (004) plane rocking curves on Al/SiO$ sb2$/Si substrates and 2.0$ sp circ$ FWHM (002) rocking curves on Corning Glass slides. The films have close-to-bulk Zinc Oxide densities and an electromechanic coupling constant of 0.25, compared to the bulk value of 0.29. These data, to our best knowledge, are the best that have been reported.
Using the same technique, Zinc Oxide thin films have been grown onto the cross sections of tapered cladded acoustic fibers to excite acoustic waves propagating along the fiber cores. Experiments revealed that good quality ZnO transducers, structured as Au/ZnO/Al/acoustic-fiber, have been fabricated on the tapered fibers and shear acoustic waves were guided along the acoustic fiber cores.
Idioma: en