| Título: | The contribution of fast neutrals to cathode erosion in glow discharges |
| Autores: |
Abril Sánchez, Isabel Gras Martí, Albert Vallés Abarca, José Antonio |
| Fecha: |
2013-01-07 2013-01-07 1984-09-14 |
| Publicador: | RUA Docencia |
| Fuente: |
 |
| Tipo: | info:eu-repo/semantics/article |
| Tema: |
Neutrals Cathode erosion Glow discharge Física Aplicada |
| Descripción: |
We calculate the rate at which a target located at the cathode of a glow discharge is sputtered. The calculation involves two steps: (1) evaluation of the energy distribution functions of ions and neutrals impinging on the target; and (2) convolution of these distributions with known sputtering functions. We show that under certain conditions, charge-exchange collisions lead to sputtering predominantly by fast neutrals. This work is part of a research project under the auspices of the Spanish CAICYT (Proyecto no 599), and an 'Acción Integrada' in collaboration with the University of Salford (financially supported by The British Council and the Spanish MEC). |
| Idioma: | Inglés |
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