Heavily used in the manufacture of integrated circuits, chemical-mechanical polishing (CMP) is becoming an enabling technology for microelectromechanical systems (MEMS). To reliably use CMP in the manufacturing process, designers must be able to accurately predict the CMP process and control…

The contribution of this thesis is to provide a tractable framework for supply chains and revenue management problems subject to uncertainty that gives insight into the structure of the optimal policy and requires little knowledge of the underlying probability distributions.…