Heavily used in the manufacture of integrated circuits, chemical-mechanical polishing (CMP) is becoming an enabling technology for microelectromechanical systems (MEMS). To reliably use CMP in the manufacturing process, designers must be able to accurately predict the CMP process and control…

Direct wafer bonding has emerged as an important technology in the manufacture of silicon-on-insulator substrates (SOI), microelectromechanical systems (MEMS), and three-dimensional integrated circuits (3D IC's). While the process is currently employed in applications such as these, a lack of knowledge…

The contribution of this thesis is to provide a tractable framework for supply chains and revenue management problems subject to uncertainty that gives insight into the structure of the optimal policy and requires little knowledge of the underlying probability distributions.…

This paper describes a natural language system START. The system analyzes English text and automatically transforms it into an appropriate representation, the knowledge base, which incorporates the information found in the text. The user gains access to information stored in…

Most knowledge representation languages are based on classes and taxonomic relationships between classes. Taxonomic hierarchies without defaults or exceptions are semantically equivalent to a collection of formulas in first order predicate calculus. Although designers of knowledge representation languages often express…

To determine why something has stopped working, it is useful to know how it was supposed to work in the first place. That simple observation underlies some of the considerable interest generated in recent years on the topic of model-based…

Combining numerical techniques with ideas from symbolic computation and with methods incorporating knowledge of science and mathematics leads to a new category of intelligent computational tools for scientists and engineers. These tools autonomously prepare simulation experiments from high-level specifications of…

The Bifurcation Interpreter is a computer program that autonomously explores the steady-state orbits of one-parameter families of periodically- driven oscillators. To report its findings, the Interpreter generates schematic diagrams and English text descriptions similar to those appearing in the science…

This paper describes a method for limiting vibration in flexible systems by shaping the system inputs. Unlike most previous attempts at input shaping, this method does not require an extensive system model or lengthy numerical computation; only knowledge of the…

Explanation-based learning occurs when something useful is retained from an explanation, usually an account of how some particular problem can be solved given a sound theory. Many real-world explanations are not based on sound theory, however, and wrong things may…