| Título: | Study on the Linearly Range of S-Shaped MEMS Planar Micro-spring |
| Autores: |
Li, Guozhong; Beijing Institute of Technology Sui, Li; Beijing Institute of Technology Shi, Gengchen; Beijing Institute of Technology |
| Fecha: | 2012-10-01 |
| Publicador: | TELKOMNIKA: Indonesian journal of electrical engineering |
| Fuente: |
 |
| Tipo: |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion |
| Tema: | No aplica |
| Descripción: | For the lack of formula of linear range for S-shaped MEMS planar micro-spring, this paper establishes physical and mathematical model and analysis the material stress-strain angle. The formula is deduced by calculating the strain and rotation of the basic unit of micro-spring tension. Compared with the results of the tests on micro-spring which produced by UV-LIGA process, the formula results is in about 10% higher, providing theoretical guidance for the design and application of S-shaped MEMS planar micro-spring in engineering practice. |
| Idioma: | Inglés |